- V -
VS
method
vibroscanning
method
VS
method is developed for measuring inner dimensions of
smallholes. In VS method (with a single probe system,)
the electrical contact between avibrating probe and the
inner surface of a hole is detected and the duty factor
of the contact ismeasured. Through controlled scanning by
a probe with a constant duty factor, data on theups and
downs of the surface profile are obtained. To characterize
inside profiles ofmicro-holes regardless of materials, a
twin-probe VS method (with electrical contact
between a between probes) is developed.
Meas. Sci. Technol. 10, 697 (1999) .
VT
SPM
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