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LEIS

LDOS

LES

LFM

lift-mode

    In lift-mode operation the scanning is divided into two parts and with a first scan to obtain and store topographical information and with a second scan to measure the parameter of the surface other than topography or to perform t he task while the probe height is controlled using the stored topographic information.
    US Pat. 5308974

LMM

LS SPM

LT SPM

LZT