I visited Petr Luskinovich («Delta») (the corresponding member of the Academy of Technological Science now) early spring 1985. He showed me photocopies of articles of G.Binning and H.Rohrer where were featured unique results gained by the scanning tunnel microscope (STM). I was interested about it. However fact of an opportunity to see atoms on the surfaces of conductive bodies didn't touch me, but opportunity, which I intuitively felt: to create new objects with the sizes about some nanometer on these surfaces with the a probe. I did necessary estimations and had harangue on the seminar of faculty of theoretical and experimental physics in MIET. Professor T.D.Shermergor was the head of the faculty that time. I wrote the paper - «Controllable mass transfer with nanometer resolution» and sent it to the publisher of a scientific and technical magazine «Electronic industry». It was shown how to create objects with nanometer sizes on a surface of conductive substructures by the probe of scanning tunnel microscope. The paper was denied because the inside ideas were very radical. However in 1991 magazine published this, with the initial date of income. Meantime in 1985 Binning with co-authors took out a patent on usage of STM in nanotechnology. So we consider the December 4, 1985 as official date of birth of nanotechnology in MIET. The program of researching of nanotechnologies was designed by me under the proposition of the rector of the MIET, professor V.D.Verner in the beginning of 1986. Chief of faculty of theoretical and experimental physics T.D.Shermergor created the group of employees for development and manufacture of a tunnel microscope, but he ignored me at all. It cut me and I decided to construct a tunnel microscope, certainly with despair. I worked alone. This time group of Shermergor made the orderings at the factory «Proton». I started my initiate on January 3, 1987. At the beginning I «create» a not working construction. But already at the end of March Petr Luskinovich and I was at the seminar in Moscow State University. There was held presentation of scanning tunnel microscope. It was created under a guide of Panov and iterating a construction of Binning's one. At the seminar I brought the photos of my microscope and the first scans. My microscope could work satisfactorily only after 10 o'clock in the evening, when were switched off noisy electronic devices in the institute. The application for the invention of the microscope was sent already on July 1987. The microscope was intended for the technological purposes. The copyright certificate on this microscope was the second in USSR (after M.S.Haikin) and the first on technological assigning by the way, the group of Shermergor has not made the microscope and has broken up. The results for noncontact modification of metal substrates were obtained and were published in 1988. And in 1989 results for forming quasi-one-dimensional structures in dielectric matrixes were published too. The experimental models of discrete nano-devices with tunable nonlinear properties were created in 1992. In 1993 technological tunnel microscopes combined with optical devices were constructed. The numerous experimental results served by a basis of a series candidate and doctoral theses were obtained on this microscopes. This paper was published in the scientific and technical collection «Electronic technique. Microelectronics» Library 3. 1998. Number 1(152). P. 74. .

Inventors certificate. Application N 4284963	Piezomanipulator with piezodriver of the first tunneling microscope.	Description of invention.