Center for Surface Science and Vacuum Research
Russian Committee for Standarts

Composition of group:

Pavel A.Todua - Dr.Sc., Prof, director;
Vladimir V.Kalendin - Vice-director, Dr.Sc.; mel@svrc.msk.su
Lidia N.Nevzorova - leading scientific employee, Dr.Sc.;
Victor N.Cherniakov - leading scientific employee, Dr.Sc.;
Zhamubek E.Zhelkobaev - leading scientific employee.

Source of financings of work: state budget, 3 projects in programs ministry of the sciences and technologies, grants.

Main work instrument: Standard system on base of scanning tunnel, atomic-force microscopes and lazer interferometers
The laser measuring system (LIS-01)


1. Developed the methodology of automated high-precision measurements of small linear sizes special tests - structures in a range 0,1-5,0 micrometers with the help of raster electronic microscope using theoretical models of shaping of raster-electronic-microscope-images and periodic measures (comparison standards [1, 2]).
2. The reproducibility of outcomes of measurements of linear transitions on three coordinates of the measuring equipment based on STM less than 1 bicron on area of transitions 5х5х1 micrometer during measurements less than 1 minute is reached.
3. For an atomic surface texture of high-oritntical-pirolytic graphite by square 102х107 by results of interferometry of measurements of transitions of graphite along X and Y axeses is obtained lateral resolution 0, 24 нм, that corresponds to a parameter of a low level cell of graphite. For the first time there was practically reaced correlation of two physical constants - 1) the length of He-Ne laser waves and 2) constant of a lattice of graphite crystal.
4. The mutual circular checkings of outcomes of measurements of a special dashed measures phase (holographic lattices) in a range 0,2-0,5 micrometer on standard installations im some France and Russian institutes are conducted. The divergence of outcomes of measurements does not exceed 1 bicron.

Main publications of last years:

Kozlitin A.I., Nikitin A.V., Repin O.I., Sterensky V.N. The Automatized Measurments of Ultra Small Dimensions with Using of the Theoretical Modeles and Natural Constants (The "Standardless" Method) // Journ. Of Advanced Materials. 1995, N5, pp24-29.

V.V. Kalendin, V.N. Сhernyakov, P.A. Todua, Z.E. Zhelkobaev. Etalon Interferometric Comparator for 3D Measurement of Surface Topography Based on the Scanning Tunnel and Atomic Force Microscopes. // Progress in Precision Engineering and Nanotechnology. Proceedings of the 9th International Precision Engineering Seminar Braunshweig, Germany, 1997 v.1, pp. 138-139.

V.Ja Barash, Zh.Zhelkobaev, V.V. Kalendin “Radiooptical phase comparator of nanometric fand”. // Proceeding of the 8th International Precision Engineering Seminar, Compiegne France, May, 1995, p. 117.

V.V. Kalendin, V.Ja Barash, V.N. Chernyakov “Measure scanning interference atomic-force microscope.” “Proceeding of the 8th International Precision Engineering Seminar, Compiegne, France, May, 1995, p.211.

V.V. Kalendin, V.N. Chernyakov, P.A. Todua, Zh.Zhelkobaev “Etalon laser interferential comparator on the basis of the scanning tunnel and atom-force microscope”. “Proceeding of 5th IMEKO TC-14 Symposium on DIMENSIONAL METROLOGY in production and quality control SMQC`-95” Zazagozo (Spain), October, p.71.

P.A. Todua, Zh.Zhelkobaev, V.V. Kalendin “Fast laser two-frequency interferometer-psasemeter”. “Proceeding of 5th IMEKO TC-14 Symposium on DIMENSIONAL METROLOGY in production and quality control SMQC`-95” Zazagozo (Spain), October, p.21.

Zh.Zhelkobaev, V.V. Kalendin and B.G. Vladimirov “High precision laser system for measurement of mechanical parameters of motion”. “Proceeding of the International conference of experimental mecanics” Advances and Application ICEM`96 Singapore, September, p. 48-50.

V.V. Kalendin, V.N. Chernyakov, Zh.Zhelkobaev and A.Xa. Pozhrov “Precision system for 3D measurement of topography of surface based on the atom-force microscope and laser interfermeters.” “Proceeding of the 2nd Congress and Exhibition for Optical Sensor Technology Measuring Techniques Electronics” OPTO-96 Leiprig, Septemter, p. 24-25.

V.V. Kalendin, Zh.Zhelkobaev and V.S. Chikhalov “Multifunctional measuring system based on a two-frequency laser interferometer-phasemeter” “Proceeding of the 2nd Congress and Exhibition for Optical Sensor Technology Measuring Techniques Electronics” OPTO-96 Leiprig, Septemter, p. 117-118.

V.V. Kalendin, V.N. Chernyakov, P.A. Todua and Zh.Zhelkobaev “Etalon interferometric comparator for 3D Measurements of Surface topography based on the Scanning tunnel and Atomic Force Microscopes” Proceeding of the 9th International Precision Engineering Seminar Stadhall, Braun Schweig, Germany 28-30 May 1997

Contact person: Vladimir V.Kalendin
Tel.: ++7 (095) 132-66-87

Fax: ++7 (095) 132-60-13

E-mail: fgup_nicpv@mail.ru

Postal address: 38 Vavilova Str., 117925, Moscow, Russia.